An Ultrathin Nanoelectromechanical Transducer Made of Hafnium Zirconium Oxide (Tech Xplore)

An Ultrathin Nanoelectromechanical Transducer Made of Hafnium Zirconium Oxide

In a study published in Nature Electronics, researchers at the University of Florida were able to fabricate an ultrathin nanoelectromechanical transducer using 10-nm-thick ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2) films. The team includes two senior researchers, Roozbeh Tabrizian and Toshikazu Nishida, as well as students Mayur Ghatge and Glenn Walters.

“Our research has followed the long-standing quest in semiconductor sensors and actuators communities for truly integrated nanoelectromechanical transducers,” Tabrizian, the lead researcher on the study, told TechXplore. “Nanoelectromechanical transducers facilitate harnessing high-frequency and high-quality factor (Q) mechanical resonance dynamics in semiconductor nanostructures to realize monolithically integrated frequency references and wideband spectral processors at centimeter- and millimeter-wave regimes.”

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